发明名称 METHOD AND DEVICE FOR BONDING OF SUBSTRATES
摘要 <p>A device and method for bonding first substrates to second substrates. The device includes: a receptacle for accommodating a carrier substrate, a placement device for placing multiple first substrates on a substrate side of the carrier substrate that faces away from the receptacle, and a fixing device for fixing each of the first substrates on the substrate side on at least one fixing section of each first substrate. The method includes the following steps: placement of multiple first substrates on a substrate side of a carrier substrate accommodated on a receptacle, and fixing of each first substrate on the substrate side on at least one fixing section of each first substrate.</p>
申请公布号 KR20140107343(A) 申请公布日期 2014.09.04
申请号 KR20147018021 申请日期 2011.12.28
申请人 EV GROUP E. THALLNER GMBH 发明人 BURGGRAF JURGEN
分类号 H01L21/68;H01L21/67;H01L21/687 主分类号 H01L21/68
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