发明名称 TABLE ASSEMBLY FOR SUPPORTING SEMICONDUCTOR DEVICES
摘要 A table assembly to support semiconductor devices includes a support plate made of a light transmitting material to support the semiconductor devices, and a back light unit positioned under the support plate. A protective film is provided on the surface of the support plate and the surface damage of the support plate can be prevented by the protective film.
申请公布号 KR20140106839(A) 申请公布日期 2014.09.04
申请号 KR20130020962 申请日期 2013.02.27
申请人 SEMES CO., LTD. 发明人 KIL, JI SUN;SHIN, KUM SU;YEO, HUNG BIN
分类号 H01L21/683;H01L21/66 主分类号 H01L21/683
代理机构 代理人
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