| 摘要 |
The present invention relates to a plasma diagnostic apparatus and a diagnostic method thereof. The plasma diagnostic apparatus comprises: water cooled external pipe (3), which includes an enthalpy probe at the center, has an inner diameter bigger than a protective pipe (2) of the enthalpy probe, and is arranged to be coaxial with the enthalpy probe; an annular spacing (4) which is formed between the water cooled external pipe and a conventional enthalpy probe with predetermined distances from the water cooled external pipe and the enthalpy probe; a housing (5) which houses and supports a gas collecting pipe (1), the protective pipe (2), the water cooled external pipe (3), and the annular spacing (4) of the enthalpy probe, and serves as a passage for connecting the pipes and spacing to a pressure gauge, a cooling water supply device, and a gas analyzer according to functions of them; the pressure gauge (6), which is connected to the gas collecting pipe (1) through the housing and measures a voltage on a front surface of a probe delivered into the collecting pipe; the gas analyzer (7) which is capable of analyzing components of collected gas; cooling water inlet (8) and outlet (9) which are connected to the protective pipe (2) through the housing and serve to supply and withdraw the cooling water; a connection pipe (10) which is connected to the housing and supplies the cooling water from the protective pipe (2) to the water cooled external pipe (3); heat conduction bands (11, 12, 13, 14) installed on the cooling water inlet (8), outlet (9), and the connection pipe (10); a flow meter installed on the cooling water outlet (9); and a power measuring device (16) which is connected to the annular spacing (5) through the housing and measures a surface pressure on the front surface of the probe delivered through the spacing. |
