发明名称 |
SLIDING FILM, MEMBER ON WHICH SLIDING FILM IS FORMED, AND MANUFACTURING METHOD THEREFOR |
摘要 |
The sliding film (50) applied on the surface of a member (60) that undergoes relative sliding movement is provided with: a metal-doped tetrahedral amorphous carbon layer (80); and a surface layer (90), which is formed on the metal-doped tetrahedral amorphous carbon layer (80) and the coefficient of dynamic friction of which is greater than that of the metal-doped tetrahedral amorphous carbon layer (80). |
申请公布号 |
WO2014132923(A1) |
申请公布日期 |
2014.09.04 |
申请号 |
WO2014JP54332 |
申请日期 |
2014.02.24 |
申请人 |
NIKON CORPORATION |
发明人 |
TAKI, YUSUKE |
分类号 |
C23C14/06;G02B7/02;G03B17/14;H04N5/225 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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