发明名称 SLIDING FILM, MEMBER ON WHICH SLIDING FILM IS FORMED, AND MANUFACTURING METHOD THEREFOR
摘要 The sliding film (50) applied on the surface of a member (60) that undergoes relative sliding movement is provided with: a metal-doped tetrahedral amorphous carbon layer (80); and a surface layer (90), which is formed on the metal-doped tetrahedral amorphous carbon layer (80) and the coefficient of dynamic friction of which is greater than that of the metal-doped tetrahedral amorphous carbon layer (80).
申请公布号 WO2014132923(A1) 申请公布日期 2014.09.04
申请号 WO2014JP54332 申请日期 2014.02.24
申请人 NIKON CORPORATION 发明人 TAKI, YUSUKE
分类号 C23C14/06;G02B7/02;G03B17/14;H04N5/225 主分类号 C23C14/06
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