发明名称 |
DEVICE AND METHOD FOR EVACUATING A CHAMBER AND PURIFYING THE GAS EXTRACTED FROM SAID CHAMBER |
摘要 |
<p>A device evacuates a chamber and purifies the gas extracted from said chamber of any foreign substances. The device comprises a dry-condensing vacuum pump having an input connected to the chamber to be evacuated and is suitable for maintaining the input pressure at a constant level at the output despite variable conditions. An intermediate line which connects to the output of the dry-condensing vacuum pump and a liquid ring vacuum pump, the input of which is connected to the intermediate line, are additionally provided. A corresponding method makes it possible to purify the gas of any foreign substances reliably and effectively.</p> |
申请公布号 |
KR20140107397(A) |
申请公布日期 |
2014.09.04 |
申请号 |
KR20147018745 |
申请日期 |
2012.12.12 |
申请人 |
STERLING INDUSTRY CONSULT GMBH |
发明人 |
KOESTERS HEINER;GOTTSCHLICH UWE |
分类号 |
F04B41/06;F04C19/00;F04C23/00 |
主分类号 |
F04B41/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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