发明名称 THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>Provided are a thin film transistor substrate and a method of manufacturing the same. The thin film transistor substrate includes a gate electrode located on an insulating substrate, a gate insulating layer located on the gate electrode, a source/drain electrode located on the gate insulating layer, and an oxide semiconductor layer which is located between the gate insulating layer and the source/drain electrode and includes a first part which does not touch the source/drain electrode and has a defined channel region and a second part which touches the source/drain electrode and has a defined contact region. The second part can include a first oxide semiconductor layer and a second oxide semiconductor layer located on the first oxide semiconductor layer.</p>
申请公布号 KR20140106042(A) 申请公布日期 2014.09.03
申请号 KR20130020010 申请日期 2013.02.25
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM, HYEON SIK
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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