发明名称 |
DIAGNOSTIC METHOD AND APPARATUS FOR CHARACTERIZATION OF A NEUTRAL BEAM AND FOR PROCESS CONTROL THEREWITH |
摘要 |
An apparatus and method for characterizing a particle beam provides receiving a particle beam in a central region of a reduced pressure enclosure; impacting the received beam against a beam strike that is thermally isolated from the enclosure; measuring a temperature change of the beam strike due to the impacting beam; measuring a pressure change in the enclosure due to receiving the beam; and processing the measured temperature change and the measured pressure change to determine beam characteristics. |
申请公布号 |
EP2771907(A1) |
申请公布日期 |
2014.09.03 |
申请号 |
EP20120843609 |
申请日期 |
2012.10.25 |
申请人 |
EXOGENESIS CORPORATION |
发明人 |
KIRKPATRICK, SEAN, R.;KIRKPATRICK, ALLEN, R. |
分类号 |
H01L21/44;H01J37/244;H01J37/304;H01J37/317;H01L21/265 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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