发明名称 |
METHOD FOR PROVIDING SEQUENTIAL POWER PULSES |
摘要 |
<p>The present invention relates to a method for providing power pulses for PVD sputter cathodes which comprise a power consumption component and a cathode element, wherein during a power increase interval for a generator the power on the power consumption component is decreased and then the power on the cathode element is decreased, with changeover being effected such that the power draw from the generator providing the power does not have to be interrupted.</p> |
申请公布号 |
EP2771901(A1) |
申请公布日期 |
2014.09.03 |
申请号 |
EP20120784435 |
申请日期 |
2012.10.08 |
申请人 |
OERLIKON TRADING AG, TRÜBBACH |
发明人 |
KRASSNITZER, SIEGFRIED;LENDI, DANIEL;LECHTHALER, MARKUS |
分类号 |
H01J37/34;C23C14/34 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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