PATTERN FORMING APPARATUS, PATTERN FORMING METHOD, ALIGNMENT APPARATUS AND ALIGNMENT METHOD

摘要

A carrier BL for supporting a pattern, and a transcribed body SB on which a pattern is transcribed are arranged to face each other. The carrier BL is located on a first target location by moving a first maintaining means (61) based on the result of photographing at least a part of the outer circumference of the carrier BL. The transcribed body SB is located on a fixed second target location by moving a second maintaining means (41) based on the result of photographing at least a part of the outer circumference of the transcribed body SB. A first alignment mark formed on the carrier BL and a second alignment mark formed on the transcribed body are photographed, and at least one between the first maintaining means (61) and the second maintaining means (41) is moved based on the photographing result, so the locations of the carrier BL and the transcribed body SB are adjusted.