发明名称 |
PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH STRESS LAYER |
摘要 |
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10). |
申请公布号 |
EP2771132(A2) |
申请公布日期 |
2014.09.03 |
申请号 |
EP20120810422 |
申请日期 |
2012.10.26 |
申请人 |
KONINKLIJKE PHILIPS N.V. |
发明人 |
DIRKSEN, PETER;DEKKER, RONALD;HENNEKEN, VINCENT ADRIANUS;LEEUWESTEIN, ADRIAAN;MARCELIS, BOUT;FRASER, JOHN DOUGLAS |
分类号 |
B06B1/02 |
主分类号 |
B06B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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