发明名称 |
METHOD FOR TREATING AND DIRECTLY BONDING A LAYER OF MATERIAL |
摘要 |
<p>A method for treating at least one first material layer including siloxane bonds, wherein at least one surface can be interlocked with a surface of a second material layer by direct bonding, the method including: at least one forced diffusion at a temperature greater than or equal to 30° C., at least in the first material layer, of chemical species including at least one pair of free electrons and at least one labile proton; and converting at least one portion of the siloxane bonds into silanol bonds in at least one portion of the first material layer extending from the surface to a depth greater than or equal to approximately 10 nm.</p> |
申请公布号 |
EP2771911(A1) |
申请公布日期 |
2014.09.03 |
申请号 |
EP20120775522 |
申请日期 |
2012.10.24 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
MORICEAU, HUBERT;FOURNEL, FRANCK;MORALES, CHRISTOPHE;RAUER, CAROLINE |
分类号 |
H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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