METHOD OF MANUFACTURING ZNMGO FILM

摘要

A method of manufacturing a ZnMgO film includes the steps of in order: dissolving a zinc material and a magnesium material in an aqueous ammonia solution having a temperature at which, in an aqueous solution state diagram which represents ion concentrations on a vertical axis and pH on a horizontal axis, a line a demarcated by a region where Zn(OH)2 precipitates and a region where ZnO22−can exist is positioned on a low pH side from a lineβdemarcated by a region where magnesium ions can exist and a region where Mg(OH)2 precipitates, and adjusting the pH of the aqueous ammonium solution and the zinc ion concentration and magnesium ion concentration in the aqueous ammonia solution within a region lying between the line a and lineβ; elevating the temperature of the aqueous ammonia solution to a temperature at which Zn(OH)2 and Mg(OH)2 precipitate; and firing the precipitate.