| 摘要 |
The present invention relates to a vacuum chamber apparatus of a vacuum window manufacturing facility, wherein the vacuum chamber apparatus transfers a pallet having at least one piece of a glass plate for a vacuum window mounted thereon; generates a high vacuum pressure in a space between the glass plates; and comprises: a first outer chamber having a pallet input slot on one side thereof, having a pallet output slot on the other side thereof having a transfer space therein; a first inner chamber installed in the first outer chamber, and primarily heating or cooling the glass plates mounted on the pallet; and a pallet transfer unit installed in the first outer chamber, and transferring the pallet. Therefore, according to the present invention, the vacuum chamber apparatus of a vacuum window manufacturing facility is capable of automating a process by forming the high vacuum pressure in a plurality of stages in the space between the glass plates transferred along an automation line, is capable of improving heat efficiency by having the heat medium circulation-type chamber therein, is capable of largely improving productivity, and is capable of improving the degree of vacuum. |
