摘要 |
<p>A sputtering apparatus that includes at least a target presented as an inner surface of a confinement structure, the inner surface of the confinement structure is preferably an internal wall of a circular tube. A cathode is disposed adjacent the internal wall of the circular tube. The cathode preferably provides a hollow core, within which a magnetron is disposed. Preferably, an actuator is attached to the magnetron, wherein a position of the magnetron within the hollow core is altered upon activation of the actuator. Additionally, a carriage supporting the cathode and communicating with the target is preferably provided, and a cable bundle interacting with the cathode and linked to a cable bundle take up mechanism provided power and coolant to the cathode, magnetron, actuator and an anode of the sputtering apparatus.</p> |
申请人 |
POOLE VENTURA, INC.;BROOKHAVEN SCIENCE ASSOCIATES LLC |
发明人 |
ERICKSON, MARK;POOLE, HENRY;CUSTER, ARTHUR;HERSHCOVITCH, ADY |