发明名称
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing process of a thin-film device that utilizes transfer technologies, the thin-film device capable of preventing electrification produced due to induction after the manufacture, and a method of manufacturing the thin-film device. SOLUTION: The manufacturing method of the thin-film device includes a step of transferring a thin-film element (transfer object layer 110) on a second conductive transfer substrate 120 and a step thereafter of connecting an electrode terminal 130 for imparting reference potential to a thin film element circuit formed of the thin-film element, or the like, to the second conductive transfer substrate 120. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP5581599(B2) 申请公布日期 2014.09.03
申请号 JP20090051607 申请日期 2009.03.05
申请人 发明人
分类号 H01L27/12;G02F1/1368;H01L21/02;H01L21/336;H01L29/786 主分类号 H01L27/12
代理机构 代理人
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