| 摘要 |
Disclosed is a deposition system used to manufacture OLEDs. According to an embodiment of the present invention, the deposition system used to manufacture OLEDs includes a carrier including a chuck where a substrate is chucked and attached to; and a substrate supporting stage arranged on the lower area of the carrier. The substrate supporting stage includes a plurality of substrate supporting pin units which support the lower side of the substrate to prevent the sagging of the substrate; and a plurality of substrate pressing units which are arranged near the substrate supporting pin units and press the substrate toward the substrate supporting pin units to prevent the substrate from slipping when the substrate is being spread. |
