Method for making a perpendicular magnetic recording disk with template layer formed of nanoparticles embedded in a polymer material

摘要

A method for making a perpendicular magnetic recording disk includes forming a template layer below a Ru or Ru alloy underlayer, with a granular Co alloy recording layer formed on the underlayer. The template layer is formed by depositing a solution of a polymer with a functional end group and nanoparticles, allowing the solution to dry, annealing the polymer layer to thereby form a polymer layer with embedded spaced-apart nanoparticles, and then etching the polymer layer to a depth sufficient to partially expose the nanoparticles so they protrude above the surface of the polymer layer. The protruding nanoparticles serve as controlled nucleation sites for the Ru or Ru alloy atoms. The nanoparticle-to-nanoparticle distances can be controlled during the formation of the template layer. This enables control of the Co alloy grain diameter distribution as well as grain-to-grain distance distribution.

主权项

1. A method for making a perpendicular magnetic recording disk comprising:
providing a substrate; depositing on the substrate a solution of a polymer with a functional end group and a plurality of nanoparticles; allowing the solution to dry, thereby forming a polymer layer with embedded spaced-apart nanoparticles; etching the polymer layer to a depth sufficient to partially expose the nanoparticles; depositing a seed layer over the etched polymer layer and the partially exposed nanoparticles; depositing an underlayer selected from Ru and a Ru alloy on the seed layer; and depositing a perpendicular magnetic recording layer on the underlayer, the recording layer comprising a layer of granular ferromagnetic Co alloy and one or more oxides of one or more of Si, Ta, Ti Nb, B, C, and W.