Semiconductor resistor including a dielectric layer including a species creating fixed charges and method for the formation thereof

摘要

A semiconductor structure includes a resistor. The resistor includes a semiconductor region, a dielectric layer, a first electrical connection and a second electrical connection. The dielectric layer is provided on the semiconductor region and includes a high-k material having a greater dielectric constant than silicon dioxide. The dielectric layer includes a species creating fixed charges. A first electrical connection is provided at a first end of the semiconductor region and a second electrical connection is provided at a second end of the semiconductor region.

主权项

1. A semiconductor structure comprising a resistor, the resistor comprising:
a semiconductor region; a dielectric layer provided over said semiconductor region, said dielectric layer comprising a high-k material having a greater dielectric constant than silicon dioxide, wherein said dielectric layer comprises a species creating fixed charges; a first electrical connection at a first end of said semiconductor region; and a second electrical connection at a second end of said semiconductor region.