| 发明名称 | System for measuring the image quality of an optical imaging system | ||
| 摘要 | Methods for measuring the image quality of a projection objective include providing a measuring structure on an image-side of the projection objective, providing an immersion fluid between the projection objective and the measuring structure, directing light through the projection objective and the immersion fluid to the measuring structure while shielding the measuring structure from the immersion fluid, detecting light transmitted by the measuring structure, and determining an image quality of the projection objective based on the detected light. | ||
| 申请公布号 | US8823948(B2) | 申请公布日期 | 2014.09.02 |
| 申请号 | US201313918113 | 申请日期 | 2013.06.14 |
| 申请人 | Carl Zeiss SMT GmbH | 发明人 | Mengel Markus;Wegmann Ulrich;Ehrmann Albrecht;Emer Wolfgang;Clement Reiner;Mathijssen Ludo |
| 分类号 | G01B11/02;G03F7/20;G01M11/02 | 主分类号 | G01B11/02 |
| 代理机构 | Fish & Richardson P.C. | 代理人 | Fish & Richardson P.C. |
| 主权项 | 1. A method for measuring the image quality of a projection objective, the method comprising: providing a measuring structure on an image-side of the projection objective; providing an immersion fluid between the projection objective and the measuring structure; directing light through the projection objective and then through the immersion fluid to the measuring structure while shielding the measuring structure from the immersion fluid; detecting the light transmitted by the measuring structure; and determining an image quality of the projection objective based on the detected light, wherein the projection objective is a projection objective for a microlithographic projection exposure system. | ||
| 地址 | Oberkochen DE | ||