| 发明名称 | Shape measurement apparatus, and shape measurement method | ||
| 摘要 | A shape measurement apparatus includes a distance measurement meter configured to emit and receive the beam in relation to the object; a beam deflection mechanism configured to deflect the beam from the distance measurement meter; and a control unit configured to determine at least one of a maximum beam deflection angle due to the beam deflection mechanism and the distance between a detected surface and the beam deflection mechanism when the beam is incident perpendicularly to the detected surface of the object, so that an error of a first measurement error that depends on a change in a spot diameter of the beam on the detected surface and a second measurement error that depends on an incidence angle on the detected surface of the beam is no more than a threshold value of a permitted error. | ||
| 申请公布号 | US8823950(B2) | 申请公布日期 | 2014.09.02 |
| 申请号 | US201313958682 | 申请日期 | 2013.08.05 |
| 申请人 | Canon Kabushiki Kaisha | 发明人 | Nakauchi Akihiro |
| 分类号 | G01B11/24;G01B21/04 | 主分类号 | G01B11/24 |
| 代理机构 | Rossi, Kimms & McDowell LLP | 代理人 | Rossi, Kimms & McDowell LLP |
| 主权项 | 1. A shape measurement apparatus configured to measure a shape of an object to be detected by emission and receipt of a beam, the apparatus comprising: a distance measurement meter configured to emit and receive the beam in relation to the object; a beam deflection mechanism configured to deflect the beam from the distance measurement meter; and a control unit configured to determine at least one of a maximum beam deflection angle due to the beam deflection mechanism and the distance between a detected surface and the beam deflection mechanism when the beam is incident perpendicularly to the detected surface of the object, so that an error of a first measurement error that depends on a change in a spot diameter of the beam on the detected surface and a second measurement error that depends on an incidence angle on the detected surface of the beam is no more than a threshold value of a permitted error. | ||
| 地址 | JP | ||