| 发明名称 | Charged particle beam apparatus having noise absorbing arrangements | ||
| 摘要 | Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus. | ||
| 申请公布号 | US8822952(B2) | 申请公布日期 | 2014.09.02 |
| 申请号 | US201113883764 | 申请日期 | 2011.10.14 |
| 申请人 | Hitachi High-Technologies Corporation | 发明人 | Muto Daisuke;Watanabe Masanori;Matsushima Masaru;Nakagawa Shuichi;Akatsu Masahiro;Tanba Yusuke;Okada Satoshi |
| 分类号 | H01J37/16;H01J37/28;H01J37/26;G10K11/172 | 主分类号 | H01J37/16 |
| 代理机构 | Antonelli, Terry, Stout & Kraus, LLP. | 代理人 | Antonelli, Terry, Stout & Kraus, LLP. |
| 主权项 | 1. A charged particle beam apparatus, comprising: an apparatus main body which has at least a scanning electron microscope capturing an image of a sample; and a cover provided around the apparatus main body, wherein a noise absorber which has a noise absorbing frequency band including the natural frequency of the apparatus main body, or the frequency of acoustic standing waves generated within the cover is provided within the cover. | ||
| 地址 | Tokyo JP | ||