发明名称 |
Self-assembled structures, method of manufacture thereof and articles comprising the same |
摘要 |
Disclosed herein is a composition comprising a graft block copolymer comprising a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety; and a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to crosslink the graft block copolymer; a photoacid generator; and a crosslinking agent. |
申请公布号 |
US8822130(B2) |
申请公布日期 |
2014.09.02 |
申请号 |
US201213681019 |
申请日期 |
2012.11.19 |
申请人 |
The Texas A&M University System;Rohm and Haas Electronics Materials LLC |
发明人 |
Cho Sangho;Sun Guorong;Wooley Karen L.;Thackeray James W.;Trefonas, III Peter |
分类号 |
G03F7/038;G03F7/30;G03F7/004;G03F7/20 |
主分类号 |
G03F7/038 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP |
主权项 |
1. A composition comprising:
a graft block copolymer comprising:
a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety; anda second block polymer; the second block polymer being covalently bonded to the first block polymer; wherein the second block polymer comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to crosslink the graft block copolymer; a photoacid generator; and a crosslinking agent. |
地址 |
College Station TX US |