Load port module

摘要

A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.

主权项

1. A substrate loading device comprising:
a frame adapted for connecting the device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the device and processing apparatus; a cassette support connected to the frame for holding at least one substrate holding cassette; a user interface for inputting information, the user interface being mounted to the frame so that the user interface is integral with the frame and having a user interface controller; and a controller communicably connected to each controllably operable system of the substrate loading device and to the user interface, the controller being configured to receive and send information to the user interface; wherein the user interface controller is communicably connected to at least one controllably operable system of the substrate loading device and the user interface controller is
configured to effect operation of the at least one controllably operable system by bypassing the controller, andconfigured to effect operation of the at least one controllably operable system through the controller.