Irradiation device and irradiation method

摘要

An irradiation device includes: a light source having an amalgam alloy member that is disposed on a part of the inner surface of a light source tube; and a chamber in which the light source is disposed. The chamber includes: a main chamber body; and a first gas inflow port and a first gas outflow port that are formed in the main chamber body. The first gas inflow port and the first gas outflow port are arranged so that the outer surface of the part of the light source tube where the amalgam alloy member is disposed is positioned in a flow path of a gas that flows in through the first gas inflow port and flows out through the first gas outflow port.

主权项

1. An irradiation device comprising:
a light source having an amalgam alloy member that is disposed on a part of the inner surface of a light source tube; and a chamber in which the light source is disposed, wherein the chamber includes: a main chamber body; and a first gas inflow port and a first gas outflow port that are formed in the main chamber body, and wherein the first gas inflow port and the first gas outflow port are arranged so that the outer surface of the part of the light source tube where the amalgam alloy member is disposed is positioned in a flow path of a gas that flows in through the first gas inflow port and flows out through the first gas outflow port, wherein the first gas inflow port and the first gas outflow port are arranged at the positions sandwiching the amalgam alloy member between the first gas inflow port and the first gas outflow port in a direction that intersects with an extension direction of the light source tube, wherein the light source is equipped with a discharge electrode, and the chamber further includes a second gas inflow port and a second gas outflow port that are formed in the main chamber body, and wherein the second gas inflow port and the second gas outflow port are arranged so that the outer surface of a portion of the light source tube where the discharge electrode is disposed is positioned in a flow path of a gas that flows in through the second gas inflow port and flows out through the second gas outflow port.