发明名称 |
Semiconductor device and method of manufacturing the same |
摘要 |
A semiconductor device having a buried gate is provided. The semiconductor device is formed in a structure in which a plurality of contacts having small step differences are stacked without forming a metal contact applying an operation voltage to the buried gate in a single contact and a contact pad is formed between the contacts so that failure due to misalignment can be prevented without a separate additional process for forming the contacts. |
申请公布号 |
US8823086(B2) |
申请公布日期 |
2014.09.02 |
申请号 |
US201213346829 |
申请日期 |
2012.01.10 |
申请人 |
Hynix Semiconductor Inc. |
发明人 |
Cho Chul Hwan |
分类号 |
H01L29/66 |
主分类号 |
H01L29/66 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor device having a buried gate, comprising:
a lower gate contact formed in a pad area to be coupled to the buried gate in a cell area; a gate contact pad coupled to the lower gate contact, wherein the gate contact pad is simultaneously formed when a bit line is formed in the cell area; and an upper gate contact coupled to the gate contact pad and configured to couple the gate contact pad and a metal line. |
地址 |
Icheon KR |