发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device having a buried gate is provided. The semiconductor device is formed in a structure in which a plurality of contacts having small step differences are stacked without forming a metal contact applying an operation voltage to the buried gate in a single contact and a contact pad is formed between the contacts so that failure due to misalignment can be prevented without a separate additional process for forming the contacts.
申请公布号 US8823086(B2) 申请公布日期 2014.09.02
申请号 US201213346829 申请日期 2012.01.10
申请人 Hynix Semiconductor Inc. 发明人 Cho Chul Hwan
分类号 H01L29/66 主分类号 H01L29/66
代理机构 代理人
主权项 1. A semiconductor device having a buried gate, comprising: a lower gate contact formed in a pad area to be coupled to the buried gate in a cell area; a gate contact pad coupled to the lower gate contact, wherein the gate contact pad is simultaneously formed when a bit line is formed in the cell area; and an upper gate contact coupled to the gate contact pad and configured to couple the gate contact pad and a metal line.
地址 Icheon KR