发明名称 PLATE-SHAPED MEMBER TRANSFER FACILITY
摘要 <p>A stocker facility includes a rack configured to store glass plates in a standing state such that the glass plates are arranged in a front-rear direction and a stocker configured to cause the glass plate to move in a left-right direction to transfer the glass plate to and from the rack. Thus, the present invention provides a plate-shaped member transfer facility capable of carrying the plate-shaped member in between two spaced-apart plate-shaped members between which a storage pitch is short and carrying any one of a plurality of plate-shaped members out from the rack without inserting an end effect in a substrate storage portion of the rack.</p>
申请公布号 KR101436764(B1) 申请公布日期 2014.09.02
申请号 KR20137002788 申请日期 2011.06.10
申请人 发明人
分类号 B65G1/00;B65G49/06;H01L21/677 主分类号 B65G1/00
代理机构 代理人
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