Polymeric materials and methods for making the polymeric materials

摘要

Polymeric materials, methods for making the polymeric materials, and photoresist formulations utilizing the polymeric materials are disclosed. In one aspect, a polymeric material is provided including a condensation product of a reaction mixture comprising an aldehyde with a phenolic monomer composition comprising m-cresol, p-cresol, 3,5-dimethyl phenol, and 2,5-dimethyl phenol. The polymeric material may be further contacted with a photoactive compound and a solvent to form a photoresist formulation.

主权项

1. A method for forming a polymeric material, comprising:
charging m-cresol, p-cresol, 3,5-dimethyl phenol, 2,5-dimethyl phenol, and an acid catalyst to a reactor to form a reaction mixture; heating the reaction mixture to a temperature from about 70° C. to about 110° C.; charging an aldehyde to the reaction mixture; and condensing the reaction mixture, wherein the condensing the reaction mixture comprises:
refluxing the reaction mixture for a first period of time;distilling the reaction mixture for a second period of time; andremoving residual water and free monomers; and adding p-cresol after the refluxing the reaction mixture and prior to the distilling the reaction mixture.