Apparatus for manufacturing flat-panel display

摘要

Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.

主权项

1. A flat panel display (FPD) manufacturing apparatus that performs a process on a substrate under vacuum conditions, the apparatus comprising:
a chamber, including:
a lower chamber;an upper chamber movably positioned on the lower chamber so as to be opened away from or closed onto the lower chamber;a sealing member recess formed in a coupling surface of at least one of the upper chamber or the lower chamber;a sealing member received in the sealing member recess; anda sealing member drive unit operably coupled to the sealing member, wherein the sealing member drive unit comprises a pneumatic driver disposed in the sealing member recess, wherein the pneumatic driver is configured to be coupled to an external air pump configured to pump air into the pneumatic driver so as to inflate the pneumatic driver, and to discharge air from the pneumatic driver so as to deflate the pneumatic driver, wherein a portion of the sealing member extends out of an end of the sealing member recess when the pneumatic driver is inflated with a predetermined amount of air and the sealing member is retracted into the sealing member recess when air is discharged from the pneumatic driver.