| 摘要 |
A mask stage (10) is provided with: a mask stage base (11); four mask holders (71, 72) with the ability to adhere to and hold each edge of a mask (M); linear guides (73) disposed between a pair of mask holders (72) that adhere to and hold the side of the mask stage base (11) and the short sides of the mask (M); a drive mechanism (74) that forces the mask holders (72) to move on the short side; and a tilt angle adjustment mechanism (80) that is disposed between the side of the mask stage base (11) and the sides of the mask holders (72), and has the ability to adjust the tilt angle of the mask (M). This configuration enables a plurality of masks of different sizes to be accommodated in a state in which flatness is kept constant. |
