PRESSURE SENSOR

摘要

The invention relates to pressure sensors and can be used in micro- and nanoelectromechanical systems for monitoring environmental pressure. A pressure sensor comprises a substrate with two dielectric layers positioned over each other, an array of hydrocarbon nanotubes, the substrate is connected to said array, an interconnection in at least two spots and a sealing layer, wherein the array of the hydrocarbon nanotubes is positioned in a recess made in the substrate and dielectric layers, the interconnection is positioned between the dielectric layers and the sealing layer is arranged, at least, above the array of hydrocarbon nanotubes. The technical result provides enhancement of reliability pressure sensor sensing element functioning; enhancement pressure sensor sensitivity, avoidance influence of working medium changes on the sensor functioning.