APPARATUS FOR TRANSFER PROCESS OF LARGE AREA NANOSCALE THIN FILMS

摘要

The present invention relates to an apparatus for transferring large area nano thin films for adhering and transferring a nano thin film laminated on a top surface of a carrier film, on a substrate disposed at an upper side of the nano thin films, including a first pressing roller making contact with a lower side of the carrier film to horizontally move the carrier film; a second pressing roller making contact with an upper side of the substrate to horizontally move the substrate, and adhering and transferred to a nano thin film laminated on a top surface of the carrier film; and a dielectric barrier discharge reactor performing plasma process on the substrate to increase an adhesive force between the substrate and the nano thin film by increasing the surface energy of the substrate.