| 摘要 |
A substrate processing apparatus comprising a fixed lift pin, a method of loading and unloading a substrate using the same are provided to prevent the lift pin from being inclined by fixing a bottom part of lift pin to a pin plate. A reaction space is formed in a chamber(110). A substrate pallet(120) includes a plurality of pinholes(122) and the first heater is installed inside. A pin plate(160) is installed in the lower part of the substrate pallet and the second heater is installed inside. A part of plural lift pins(170) is connected to the upper part of the pin plate, and the other part is inserted into the plurality of pinholes of the substrate pallet. The pin plate is the same material as the substrate pallet. The lift pin screws up with the pin plate. |
