| 摘要 |
PROBLEM TO BE SOLVED: To provide an ejector type vacuum pump capable of reducing an amount of cooling fluid to be supplemented by sucking atmospheric gas into circulating fluid.SOLUTION: An ejector type vacuum pump is constituted by an ejector 1, circulating passages 2, 5, liquid pressure feeding pump 3 and tank 4 installed at the circulating passages 2, 5. A spray nozzle 10 for injecting and atomizing the circulating fluid in a tangential line direction of a side wall inner peripheral surface of the tank 4 and a slant upper direction is attached to the upper wall part of the tank 4 at the outlet side of the ejector 1. The spray nozzle 10 can inject and atomize the circulating fluid at the outlet side of the ejector 1 to an entire inner peripheral surface of the side wall and the inner surface of the upper wall of the tank 4 and cool the circulating fluid through heat radiation. Surrounding atmosphere sucked from an outer surrounding air suction passage 15 into the tank 4 is further sucked from a blower passage 13 by a blower 14 to cause the circulating fluid injected and atomized through the spray nozzle 10 to be vaporized and gasified, and then the circulating fluid can be further cooled through its evaporation latent heat. |
