| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope and an inspection apparatus which allow easy observation of a specimen existing in the ambient air with the use of the scanning electron microscope using an electron beam.SOLUTION: A scanning electron microscope comprises: a lens barrel 21 for emitting a narrowed electron beam 2; a diaphragm 10 arranged between the lens barrel and a specimen; a variable seal 12 for covering part or all of a surface of the specimen arranged in the ambient air, which is to be an image generation target, so as to separate it from the ambient air; and evacuation means for evacuating the ambient air in the variable seal. The scanning electron microscope further comprises: a detector for introducing, into a vacuum in the lens barrel, secondary electrons released, reflection electrons reflected or X-rays generated when a flatbed scanning is performed while irradiating, with the electron beam emitted through the diaphragm of the lens barrel, the part of the image generation target on the specimen that has been separated from the ambient air by the variable seal and evacuated by the evacuation means or the specimen 15 and detecting the secondary electrons, the reflection electrons, or X-rays; and image generation means for generating an image on the basis of signals of the secondary electrons, the reflection electrons or the X-rays detected by the detector. |
