INERTIAL FORCE SENSOR

摘要

An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

主权项

1. An inertial force sensor comprising:
a substrate having a center portion that is lower than a peripheral portion; a circuit chip having a first surface connected to the peripheral portion of the substrate by first flip-chip bonding; and a sensor element connected to the first surface of the circuit chip by second flip-chip bonding in an inner side than the peripheral portion of the substrate, wherein an elastic modulus of first connection member used for the first flip-chip bonding is smaller than an elastic modulus of second connection member used for the second flip-chip bonding.