System and Methods For Nano-Scale Manufacturing

摘要

A system and method for patterning a substrate includes a mold holding fixture for holding a mold with nanostructures and a substrate holding fixture for holding a substrate having a molding surface, a stage assembly has two or more independent axis movements for moving either the mold or the substrate therein, a contact force sensor sensing a contact force between the mold surface and the molding surface, a chamber for holding the mold and substrate and for the applying of a pressure inside that is higher or lower than atmospheric pressure, a pressure regulator and a manifold for changing the pressure inside the chamber, a door on the chamber housing provides for selectively allowing the substrate and the mold to pass there through, and means to divide the chamber into two fluidly separate sub-chambers.

主权项

1. A method to pattern nano structures on a substrate from a mold comprising the steps of:
having a mold having a mold surface with nanostructures; having a substrate having a surface; depositing a deformable material on the surface of the substrate; positioning in a chamber the substrate with the deposited deformable material in a position facing the mold surface of the mold having the nanostructures and having a gap there between; applying a vacuum in the chamber including the gap defined between the positioned substrate and mold; forming a contact between the surface of the substrate and the mold surface of the mold; holding the contact for a predetermined period of time; and separating the substrate and the mold with the deformable material remaining on the substrate and being patterned with nanostructures corresponding to the nanostructures of the mold surface.