| 摘要 |
PROBLEM TO BE SOLVED: To prevent dryness of an inner wall surface of a spin cup and clean a coating liquid adhering to the inner wall surface with a small amount of a cleaning fluid.SOLUTION: A rotary coating apparatus includes: rotary parts 2, 3 which fix a substrate S and rotate the substrate; a nozzle which supplies a coating liquid to the substrate; a spin cup 5 having a center opening 5c that may supply the coating liquid from the nozzle to the substrate S and enclosing the substrate S; spin cup cleaning means 7, 15 which flow a cleaning fluid from a cleaning fluid supply passage 7 provided on an inner wall surface of the spin cup 5, which faces the substrate, along the inner wall surface to clean the inner wall surface; and airflow control means which stops movement of airflow in the spin cup 5 except during deposition process where the coating liquid is supplied to the substrate S while the substrate S is rotated to form a coating liquid film on the substrate S. |
