| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS vibrator in which sticking of a vibration part is suppressed. ! SOLUTION: A MEMS vibrator 1 is free both end beam type and includes a substrate 10, an insulating part 12, a lower electrode 20 as an electrode part, and a beam 33 provided with an upper electrode 30 as a vibration part, where the electrode part is provided to face the vibration part at an interval 15 against the vibration part, and connected with the vibration part at least partially. The beam 33 extends along the nodes of vibration of the vibration part. ! COPYRIGHT: (C)2014,JPO&INPIT |
