发明名称 |
LINEWIDTH MEASUREMENT SYSTEM |
摘要 |
A method includes passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material. An image of the diffraction pattern is processed to determine the dimensions of the feature. |
申请公布号 |
US2014240720(A1) |
申请公布日期 |
2014.08.28 |
申请号 |
US201214347022 |
申请日期 |
2012.09.13 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
Qiao Yi;Dolezal Michael W.;Hofeldt David L.;Lai Jack W.;Tarnowski Catherine P. |
分类号 |
G01B11/04 |
主分类号 |
G01B11/04 |
代理机构 |
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代理人 |
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主权项 |
1. A method, comprising:
passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material; forming an image of the diffraction pattern; and processing the image of the diffraction pattern to determine the dimensions of the feature. |
地址 |
St. Paul MN US |