发明名称 LINEWIDTH MEASUREMENT SYSTEM
摘要 A method includes passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material. An image of the diffraction pattern is processed to determine the dimensions of the feature.
申请公布号 US2014240720(A1) 申请公布日期 2014.08.28
申请号 US201214347022 申请日期 2012.09.13
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 Qiao Yi;Dolezal Michael W.;Hofeldt David L.;Lai Jack W.;Tarnowski Catherine P.
分类号 G01B11/04 主分类号 G01B11/04
代理机构 代理人
主权项 1. A method, comprising: passing an interrogating light beam through a Fourier transform lens and onto the surface of a material to form a Fraunhofer diffraction pattern of one or more surface features of the material; forming an image of the diffraction pattern; and processing the image of the diffraction pattern to determine the dimensions of the feature.
地址 St. Paul MN US