MEASUREMENT DEVICE

摘要

A spectrometry device includes a wavelength-tunable interference filter that is provided with a stationary reflection film, a movable reflection film and an electrostatic actuator which changes a gap dimension between the stationary reflection film and the movable reflection film; a detector that receives incident light; a filter control unit that sets the gap dimension between the stationary reflection film and the movable reflection film to be a first dimension corresponding to light having a first wavelength which is smaller than that of a measurement target wavelength region; a cutoff filter that cuts off the light having a wavelength which is smaller than that of the measurement target wavelength region; and a light quantity acquisition unit that acquires the light quantity of stray light received by the detector when the gap dimension is changed to be the first dimension.

主权项

1. A measurement device comprising:
a cutoff filter that blocks light in a predetermined wavelength region of incident light; a first reflection film that partially reflects first light transmitted through the cutoff filter and partially transmits the first light therethrough as second light; a second reflection film that is opposed to the first reflection film, the second reflection film partially reflecting the second light transmitted through the first reflection film and partially transmitting the second light therethrough as third light; a gap change unit that changes a size of a gap between the first reflection film and the second reflection film; a light receiving unit that receives the third light transmitted through the second reflection film; and a gap setting unit that controls the gap change unit and sets the size of the gap to be equal to a first dimension corresponding to a first wavelength within the predetermined wavelength region.