EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD

摘要

The present invention provides an exposure apparatus which transfers a pattern of a mask to a substrate, including a measurement unit configured to measure, at a first measurement point and a second measurement point, a height of a measurement target portion in a shot region of the substrate held by a stage, and a control unit configured to move the stage in a direction of height of the substrate based on a correction result of correcting, by a set correction value, a measured height of the measurement target portion at the first measurement point in a acceleration period of the stage, and when a measured height of the measurement target portion at the second measurement point in the constant speed period of the stage deviates from an allowable range, obtain a new correction value instead of the set correction value.

主权项

1. An exposure apparatus which transfers a pattern of a mask to a substrate while scanning the mask and the substrate, comprising:
a stage configured to hold the substrate and move; a measurement unit configured to measure, at a first measurement point and a second measurement point, a height of a measurement target portion in a shot region of the substrate held by the stage; and a control unit configured to control an exposure process of exposing the substrate in an exposure region, wherein a period in which the stage is moved to expose one shot region of the substrate includes an acceleration period in which the stage is accelerated and moved while the one shot region is brought close to the exposure region, and a constant speed period, succeeding the acceleration period, in which the stage is moved at a constant speed, and the control unit moves the stage in a direction of height of the substrate based on a correction result of correcting, by a set correction value, a height of the measurement target portion that was measured by the measurement unit at the first measurement point in the acceleration period, and when a height of the measurement target portion that was measured by the measurement unit at the second measurement point in the constant speed period deviates from an allowable range, obtains a new correction value instead of the set correction value.