DETECTOR, PET SYSTEM AND X-RAY CT SYSTEM

摘要

Each semiconductor chip of this detector is provided with: a semiconductor substrate having a plurality of photodetector parts; an insulating layer that is formed on the surface of the semiconductor substrate; a common electrode that is arranged on the insulating layer; a read wiring line that electrically connects a quenching resistor of each photodetector part and the common electrode with each other; and a through electrode which extends from the common electrode to the back surface of the semiconductor substrate through a through hole of the semiconductor substrate.