发明名称 METHOD FOR PRODUCING A MICROSCREEN
摘要 A method for producing a microscreen is described in which the microscreen consists substantially of a photoresist material, said method having the following steps: - applying a photoresist layer to a support, - partially covering the photoresist layer with a mask that defines the structure of the microscreen, - exposing the photoresist by means of the effect of radiation, - developing the photoresist, - removing the photoresist from the support, characterized in that, when the photoresist layer is applied, a liquid photoresist is used.
申请公布号 WO2014128073(A1) 申请公布日期 2014.08.28
申请号 WO2014EP52997 申请日期 2014.02.17
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 KORNELY, SUSANNE;SCHIEBER, MARKUS;SICKERT, DANIEL
分类号 B01D67/00 主分类号 B01D67/00
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