发明名称 |
NEGATIVE-TYPE PHOTOSENSITIVE SILOXANE COMPOSITION |
摘要 |
Provided is a photosensitive siloxane composition which has high resolution, high thermal resistance, and high transparency; easily controls heat sagging occurring during heat curing while not increasing the molecular weight of a crosslinking agent and a siloxane compound; and has properties of high sensitivity and a high remaining rate. Provided is a negative type photosensitive polysiloxane characterized by comprising: (I) polysiloxane, (II) an aromatic imide compound releasing an acid by laser irradiation, and (III) a solvent. |
申请公布号 |
KR20140104355(A) |
申请公布日期 |
2014.08.28 |
申请号 |
KR20140017312 |
申请日期 |
2014.02.14 |
申请人 |
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L. |
发明人 |
YOKOYAMA DAISHI;TASHIRO YUJI;NONAKA TOSHIAKI;HIRAHARA ERI;PAWLOWSKI GEORGE |
分类号 |
G03F7/075;G03F7/11;H01L21/027 |
主分类号 |
G03F7/075 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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