发明名称 NEGATIVE-TYPE PHOTOSENSITIVE SILOXANE COMPOSITION
摘要 Provided is a photosensitive siloxane composition which has high resolution, high thermal resistance, and high transparency; easily controls heat sagging occurring during heat curing while not increasing the molecular weight of a crosslinking agent and a siloxane compound; and has properties of high sensitivity and a high remaining rate. Provided is a negative type photosensitive polysiloxane characterized by comprising: (I) polysiloxane, (II) an aromatic imide compound releasing an acid by laser irradiation, and (III) a solvent.
申请公布号 KR20140104355(A) 申请公布日期 2014.08.28
申请号 KR20140017312 申请日期 2014.02.14
申请人 AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L. 发明人 YOKOYAMA DAISHI;TASHIRO YUJI;NONAKA TOSHIAKI;HIRAHARA ERI;PAWLOWSKI GEORGE
分类号 G03F7/075;G03F7/11;H01L21/027 主分类号 G03F7/075
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