UNDERCOAT AGENT AND PATTERN FORMING METHOD

摘要

Disclosed is an undercoat agent to perform phase separation of a layer formed on a substrate, wherein the layer contains a block copolymer in which a plurality of blocks is bonded. The undercoat agent contains a resin component which contains a structural unit with an aromatic group, a structural unit with a hydroxyalkyl group, a structural unit without an aromatic group and a hydroxyalkyl group.