APPARATUS FOR STORING SUBSTRATE

摘要

A substrate storage apparatus for storing a substrate having patterns on the surface includes a storage main body for storing the substrate; a first pad positioned on the basal portion of the storage main body, while including a first groove for supporting one end zone of one edge of the substrate; a second pad neighboring the first pad, while including a second groove for supporting the central zone of one edge of the substrate; and a third pad separated from the first pad, with the second pad interposed between the first and third pads, and including a third groove which supports the other end zone of the one edge of the substrate.