| 摘要 |
<p>The present invention relates to an exhaust nozzle of a doping process tube for a solar cell wafer. The exhaust nozzle is configured to comprise an exhaust nozzle for discharging exhaust gas after a progression process in a process tube; a nozzle fastening portion which is connected to the exhaust nozzle to be coupled with an exhaust pipe; and a ceramic gasket which is disposed between the exhaust nozzle and the nozzle fastening portion to separate the nozzle fastening portion from the exhaust nozzle.</p> |
