METHOD OF FORMING STRUCTURAL BODY HAVING PHASE SEPARATION STRUCTURE AND STRUCTURAL BODY HAVING PHASE SEPARATION STRUCTURE

摘要

The present invention relates to a method for manufacturing a structural body having a phase separation structure which comprises the processes of: forming a neutralization film including a surface treating agent on a substrate; forming a pattern on the neutralization film by forming, exposing, and developing a photosensitive resin film; forming a layer, on the pattern, including a block copolymer coupled with polymers of multiple types to cover the pattern and the neutralization film; and separating the layer including the proper pattern and the proper block copolymer on the neutralization film.