| 发明名称 |
INSPECTING DEVICE AND INSPECTING METHOD |
| 摘要 |
An inspecting device inspects an inspecting target that is a semiconductor device or a photo device. The inspecting device includes: a stage for holding an inspecting target; a femtosecond laser for emitting pulsed light; a galvano mirror for obliquely irradiating the inspecting target with the pulsed light, while changing an optical path of the pulsed light, to scan the inspecting target with the pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with the pulsed light from the inspecting target in accordance with the illumination with the pulsed light. |
| 申请公布号 |
US2014239182(A1) |
申请公布日期 |
2014.08.28 |
| 申请号 |
US201414192611 |
申请日期 |
2014.02.27 |
| 申请人 |
OSAKA UNIVERSITY ;DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
ITO Akira;NAKANISHI Hidetoshi;TONOUCHI Masayoshi;KAWAYAMA Iwao |
| 分类号 |
G01J1/42 |
主分类号 |
G01J1/42 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An inspecting device which takes a semiconductor device or a photo device as an inspecting target, the device comprising:
a light source for emitting pulsed light; a scan part for obliquely irradiating an inspecting target with said pulsed light, while changing an optical path of said pulsed light, to scan said inspecting target with said pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with said pulsed light from said inspecting target in accordance with the illumination with said pulsed light. |
| 地址 |
Osaka JP |
