| 发明名称 |
ALUMINUM NITRIDE SINGLE CRYSTAL SUBSTRATE AND METHOD FOR PRODUCING SAME |
| 摘要 |
The present invention relates to an aluminum nitride single crystal characterized in that the concentration of carbon is 1x10 14 atoms/cm 3 , the concentration of chlorine is 1x10 14 to 1x10 17 atoms/cm 3 , and the absorption coefficient at a wavelength of 265 nm is 40 cm -1 or less. |
| 申请公布号 |
KR20140104438(A) |
申请公布日期 |
2014.08.28 |
| 申请号 |
KR20147016397 |
申请日期 |
2011.12.22 |
| 申请人 |
TOKUYAMA CORPORATION;NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY |
发明人 |
KOUKITU AKINORI;KUMAGAI YOSHINAO;NAGASHIMA TORU;HIRAREN YUKI |
| 分类号 |
C30B29/38;C30B25/02 |
主分类号 |
C30B29/38 |
| 代理机构 |
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